Features

 

1. 1. Small size, Mechanical manipulator (L×W×H)140×148×148 mm, Controller (L×W×H)204×163×140 mm, Rotary photoelectric encoder (L×W×H)153×123×87 mm.
   2. The TFT 4.3 inch touch screen shows the position and moving speed of the activated manipulator as well as X, Y and Z.
   3. High-resolution stepper motor meets four-axis drive, the maximum distance of X, Y, Z and diagonal movement is 25mm.
   4. The maximum moving speed is 2.9mm/s.
   5. The precision mechanical system allows sub-micron resolution to 0.132 μm in the coarse range and 33 nm in the fine range.
   6. Good stability and small drift, long Term Stability＜10nm /h at 24℃.
   7. Axes positions are continuously shown in relative or absolute scales, and are easily readable on the screen.
   8. A rotary photoelectric encoder can control two manipulators and switch freely.
   9. Origin/working position function can meet the requirement of rapid return of electrode to original position/working position.
   10. High repeatable positioning accuracy：Single axis ≤1μm, three axis ≤2μm.
   11. Switch continuous increment or step increment mode directly by pressing the key.