Data set for paper 'Impact of post-ion implantation annealing on Se-hyperdoped Ge'

<p><strong>Description of the files</strong></p> <p>Files are named by the same figure order appearing in the paper and supplementary material. File types contain:<br>- *.csv: Comma separated values.&nbsp;<br>- *.fibps: Raw data obtained with the 3D optical profilometer, which can be opened and analyzed by ProfilmOnline at https://www.profilmonline.com/. Figures shown in the paper were croped from the top-left corner with areas of about 60x60 &micro;m2 from the raw data. Alternatively all 3D profilometer data shown in the paper can be obtained and analyzed in https://www.profilmonline.com/shared-folder?token=S32NP82HtLC3<br>- *.tif: Image generated from scanning electron microscope.&nbsp;</p> <p>&nbsp;</p> <p><strong>Original paper:</strong> https://doi.org/10.1063/5.0213637</p> <p><strong>Supplementary material:</strong> https://doi.org/10.60893/figshare.apl.c.7322108</p> <p>&nbsp;</p> <p><strong>When using the dataset, please cite the original paper: Xiaolong Liu, Patrick McKearney, S&ouml;ren Sch&auml;fer, Behrad Radfar, Yonder Berenc&eacute;n, Ulrich Kentsch, Ville V&auml;h&auml;nissi, Shengqiang Zhou, Stefan Kontermann, Hele Savin; Impact of post-ion implantation annealing on Se-hyperdoped Ge. Appl. Phys. Lett. 22 July 2024; 125 (4): 042102. https://doi.org/10.1063/5.0213637.</strong></p> <p>&nbsp;</p>