Dataset for 'Comparison of coherence scanning interferometry, focus variation and confocal microscopy for surface topography measurement'

<p>The original measurement data shown in Figures 1 to 3 of the Euspen conference publication: Comparison of coherence scanning interferometry, focus variation and confocal microscopy for surface topography measurement, https://www.euspen.eu/knowledge-base/ICE23170.pdf.&nbsp;</p><p><strong>Acknowledgements&nbsp;</strong></p><p>The authors would like to thank the UKRI Research England Development (RED) Fund for funding this work via the Midlands Centre for Data-Drive Metrology. This work was supported by the European Metrology Programme for Innovation and Research (EMPIR) project (TracOptic, 20IND07) and the European Union (ERC, AI-SURF, 101054454).</p>