Origin of ion bombardment induced Tb oxidation in Tb/Co multilayers

<p>It has previously been shown that ion bombardment can used to selectively reduce the contribution of the rare earth sublattice in rare earth/transition metal ferrimagnets by selective oxidation. However, the exact mechanism by which oxidation occurs remains an outstanding question. &nbsp;Using this dataset, we show that the point defects introduced by ion bombardment of Tb/Co multilayers using different ion species with projected range (i.e., 10 keV He+, 15 keV O+, and 30 keV Ga+) create easy diffusion paths for oxygen to penetrate the system.&nbsp;</p> <p><br>This dataset includes:<br>Magneto-optic measurements using P-MOKE magnetometer and Kerr effect microscope<br>Secondary ion mass spectrometry (SIMS) depth profiles<br>In-situ resistance measurements</p> <p>Input files for TRIDYN simulations<br>Results from TRIDYN simulations</p> <p><br>This work was supported by National Science Centre Poland under OPUS funding Grant No. 2020/39/B/ST5/01915 at the Institute of Molecular Physics of the Polish Academy of Sciences.</p>