Strain Mapping of Two-Dimensional Heterostructures with Subpicometer Precision

<p>The sample is a WS₂-WSe₂ lateral heterojunction with an in-plane epitaxial interface. The datasets were collected by electron microscope pixel array detector (EMPAD) under the condition described in this paper (Han, et al. Nano Letters, 18, 3746-3751 (2018)). The rotation angle between the real space and diffraction space in these datasets is 15 degrees. The data have also been analyzed in our recent paper (arXiv:2111.06496) and a conference proceeding (Shi, et al. Microsc. Microanal. 27 Suppl 1, 2021).&nbsp;</p>