Skip to main content
zenodoopen

Enhancement of real-time resonance tracking in electro-thermally actuated cantilever sensor with optimized phase characteristic (Data)

<p>Origin projects and figures used for the article &quot;Enhancement of real-time resonance tracking in electro-thermally actuated cantilever sensor with optimized phase characteristic&quot;, published in the proceedings of the 29th Micromechanics and Microsystems Europe Workshop; 26.08.2018 to 29.08.2018;&nbsp;Smolenice Castle, Slovakia.</p>

ShareScore

40/100

Overall dataset sharing score

Score breakdown

These five areas show where the dataset supports — or may limit — practical reuse.

Stewardship
4
Harmonization
4
Access
16
Reuse readiness
8
Engagement
8