High-definition electron diffraction patterns and their indexation results of a single crystal Si wafer

<p>This dataset of 1200 high-resolution (1140&times;1600) electron diffraction patterns are acquired from an unstrained single crystal Si wafer of (100) surface. The nominal sample tilt angle is 70&deg;, and the step size&nbsp;50&micro;m. The indexation results, in format &#39;mat&#39; of Matlab, by IDIC-EBSD with uniform&nbsp;and non-uniform energy levels are also provided. For each diffraction pattern, 6 parameters are stocked, i.e. the Euler angle triplet (expressed in radians and with reference&nbsp;to&nbsp;the EBSD detector) and the coordinates of the projection center.</p> <p>This dataset was discussed in a published paper (https://doi.org/10.1016/j.matchar.2022.111909).</p>