Composition and electrical resistance results of a Ir-Pd-Pt-Rh-Ru composition spread thin film materials library

<p>The dataset contains the results of electrical resistance measurement and composition analysis of a thin film composition spread materials library.&nbsp;</p> <p>342 measurement areas were evaluated for chemical composition using energy dispersive X-ray spectroscopy and electrical resistance using a 4-point probe.</p> <p>CSV columns:</p> <p>x: x-coordinate of materials library in &micro;m</p> <p>y: y-coordinate of materials library in &micro;m</p> <p>Ir: relative chemical composition in at.%</p> <p>Pd: relative chemical composition&nbsp;in at.%</p> <p>Pt: relative chemical composition&nbsp;in at.%</p> <p>Rh: relative chemical composition&nbsp;in at.%</p> <p>Ru: relative chemical composition&nbsp;in at.%</p> <p>Resistance: electrical resistance in Ohm</p> <p>&nbsp;</p> <p>This dataset is supplementary information for an associated publication. A link to the publication will be provided after publishing.</p>