Data for "Evaluating Metal-Organic Precursors for Focused Ion Beam Induced Deposition through Solid-Layer Decomposition Analysis"
<p>Experimental Data for "Evaluating Metal-Organic Precursors for Focused Ion Beam Induced Deposition through Solid-Layer Decomposition Analysis"</p> <p> </p> <p> </p> <p>The collected experimental data for tested four different metal-organic precursor layers:</p> <p> </p> <p>1 - [Cu<sub>2</sub>(μ-O<sub>2</sub>C<sup>t</sup>Bu)<sub>4]n</sub></p> <p>2 - [Cu<sub>2</sub>(NH<sub>2</sub>(NH=)CC<sub>2</sub>F<sub>5</sub>)<sub>2</sub>(µ-O<sub>2</sub>CC<sub>2</sub>F<sub>5</sub>)<sub>4</sub>]</p> <p>3 - [Cu<sub>2</sub>(µ-O<sub>2</sub>CC<sub>2</sub>F<sub>5</sub>)<sub>4</sub>]</p> <p>4 - [Ag<sub>2</sub>(μ-O<sub>2</sub>CC<sub>2</sub>F<sub>5</sub>)<sub>2</sub>]</p> <p> </p> <p>BSE.zip - includes SEM BSE images of the precursor layers</p> <p>EDX.zip - inludes SEM EDX results of the precursor layers together with exemplary python jupyter notebook to analyze EDX hyperspectral data</p>
ShareScore
32/100
Overall dataset sharing score
Score breakdown
These five areas show where the dataset supports — or may limit — practical reuse.
- Stewardship
- 4
- Harmonization
- 4
- Access
- 16
- Reuse readiness
- 8
- Engagement
- 0