Data for publication titled "Effect of ion irradiation on superconducting thin films"

<p>Here is the data to support the findings in the article titled "Effect of ion irradiation on superconducting thin films".</p> <p>There is a .txt file showing the room temperature sheet resistance measurement results for different wafers (measured by a four point probe in multiple positions of the wafer and the value in the table is the average of those measurements).</p> <p>The .csv files show resistance of the films scaled by the room temperature resistance value (R_RT) as a function of temperature. The first column is temperature (K) and the second column is R(T)/R_RT. For some wafers, there are multiple measurement results, labeled _a/_b/_c.</p> <p>The TEM images are the .tif files and FFT graphs derived from some of the TEM images are shared as .png files (titles show which TEM image has been used).</p> <p>EDS data is also shared for some wafers. The corresponding wafer is in the file names, and the data contains a .rpl, a .raw and a .png file with same main names.</p> <p>&nbsp;</p>