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Electron Bessel beam diffraction patterns, line scan of Si/SiGe multilayer

<p>Electron diffraction patterns taken with a conical illumination (electron Bessel beams) and can be used to measure strain.</p> <p>The experimental diffraction patterns, in DM3 format, are included in the file experimental_data.7z while FEM strain simulations for the same sample are in the file reference_strain_experimental.csv</p> <p>Simulated diffraction patterns are included in the file simulated_patterns.7z while the strain in the model used is in the file reference_strain_simulated_patterns.csv</p> <p>&nbsp;</p> <p>The two python scripts attached allow the extraction of the strain, and rely on the code published at:</p> <p>https://bitbucket.org/lutosensis/tem-thesis/</p> <p>&nbsp;</p>

ShareScore

44/100

Overall dataset sharing score

Score breakdown

These five areas show where the dataset supports — or may limit — practical reuse.

Stewardship
4
Harmonization
8
Access
20
Reuse readiness
8
Engagement
4