zenodoopen
Dataset for Hybrid Approach to Reconstruct Nanoscale Grating Dimensions using Scattering and Fluorescence with Soft X-rays
<p>This dataset accompanies the paper titled "Hybrid approach to reconstruct nanoscale grating dimensions using scattering and fluorescence with soft X-rays" available on arXiv. It includes measurement data, optimization results and fit data collected from a nanoscale grating with a soft X-ray fluorescence scatterometer, a model of the experiment and weighted, combined regression.</p>
ShareScore
28/100
Overall dataset sharing score
Score breakdown
These five areas show where the dataset supports — or may limit — practical reuse.
- Stewardship
- 4
- Harmonization
- 4
- Access
- 16
- Reuse readiness
- 0
- Engagement
- 4
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