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Data for Deep Reactive Ion Etching of Cylindrical Nanopores in Silicon for Photonic Crystals

<p>Data for Deep Reactive Ion Etching of Cylindrical Nanopores in Silicon for Photonic Crystals</p>

ShareScore

32/100

Overall dataset sharing score

Score breakdown

These five areas show where the dataset supports — or may limit — practical reuse.

Stewardship
4
Harmonization
0
Access
20
Reuse readiness
8
Engagement
0