Dataset related to "Atomic Force Microscope with an Adjustable Probe Direction and Integrated Sensing and Actuation"

<p>These original measurement data relate to the publication: J. Schaude, T. Hausotte: Atomic Force Microscope with an Adjustable Probe Direction and Integrated Sensing and Actuation, Nanomanufacturing and Metrology 5, pp. 519-148, <a href="https://doi.org/10.1007/s41871-022-00143-9">https://doi.org/10.1007/s41871-022-00143-9</a>. Please refer to this open access publication for a detailed description of the measurement setup and procedure.</p> <p>All data are in ASCII-format. Each file contains six columns, where column one to three are the <em>x</em>, <em>y</em>, and <em>z</em>-coordinates of the positioning system, column four is the demodulated signal of the AFM (<em>R</em>_AFM) and columns five and six are the raw signals of the <em>z</em>-interferometer (<em>Q</em>_A and <em>Q</em>_B).</p> <p><strong>Content of the folders</strong></p> <p>10_Calibrations: Repeated calibration of the AFM against the <em>z</em>-interferometer of the NMM-1.</p> <p>20_Standstill-Measurements: Three standstill measurements for 90 s each.</p> <p>30_Long-Term-Precision: Standstill measurements for 15 s every 10 min for in sum 18 hours.</p> <p>40_Scans: Repeated closed-loop scans on a calibration grating.</p> <p>50_SINCOS: Repeated movement of the stage in z-direction for 2&nbsp;&micro;m with the cantilever being in free air just before the sample.</p> <p><strong>Acknowledgement</strong></p> <p>This project was funded by the Deutsche Forschungsgemeinschaft (DFG, German Research Foundation) &ndash;TRR 285 -Project-ID 418701707, subproject C05</p>