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17 results for “spectroscopic ellipsometry”
Spectroscopic ellipsometry mapping of PAAO (AJ-1-04-20 sample)
<p>Spectroscopic ellipsometry measurement data obtained from the porous anodized aluminum oxide (PAAO). The sample was made by anodization of aluminum monocrystal in 0.3 mol/L oxalic acid at 40 V for 3 minutes and 16 seconds.</p> <p>The measurements were carried out at 20 × 20 locations covering all of the sample surface (approximately 4.8 × 4.8 mm<sup>2</sup>). The coordinates of each of 400 locations are available in "mapping_points.csv" file. All measurement data is also included in a single "AJ-1-04-20 Ellipsometry Mapping Measurements.rar" file.</p> <p>Ellipsometer: rotating compensator GES5-E (Semilab).</p> <p>Light source: 75 W xenon short arc lamp with 185-2000 nm wavelength spectrum.</p> <p>Detector: UV-Vis CCD with 0.8 nm resolution.</p> <p>Spectral range: approximately 230-960 nm.</p> <p>Light incidence angles: 50°, 55°, 60°, 65°, 70°, 75°.</p> <p>Light beam size: microspot (365 × 470 μm<sup>2</sup> at 75° angle of incidence).</p> <p>The same sample was also measured using the same spectroscopic ellipsometry method after being covered with gold nanoparticles. The data can be found here: https://doi.org/10.5281/zenodo.7059281</p>
Spectroscopic ellipsometry mapping of PAAO (AJ-3-04-20 sample)
<p>Spectroscopic ellipsometry measurement data obtained from the porous anodized aluminum oxide (PAAO). The sample was made by anodization of aluminum monocrystal in 0.3 mol/L oxalic acid at 40 V for 4 minutes and 8 seconds.</p> <p>The measurements were carried out at 20 × 20 locations covering all of the sample surface (approximately 4.8 × 4.8 mm<sup>2</sup>). The coordinates of each of 400 locations are available in "mapping_points.csv" file. All measurement data is also included in a single "AJ-3-04-20 Ellipsometry Mapping Measurements.rar" file.</p> <p>Ellipsometer: rotating compensator GES5-E (Semilab).</p> <p>Light source: 75 W xenon short arc lamp with 185-2000 nm wavelength spectrum.</p> <p>Detector: UV-Vis CCD with 0.8 nm resolution.</p> <p>Spectral range: approximately 230-960 nm.</p> <p>Light incidence angles: 50°, 55°, 60°, 65°, 70°, 75°.</p> <p>Light beam size: microspot (365 × 470 μm<sup>2</sup> at 75° angle of incidence).</p> <p>The same sample was also measured using the same spectroscopic ellipsometry method after being covered with gold nanoparticles. The data can be found here: https://doi.org/10.5281/zenodo.7115166</p>
Spectroscopic ellipsometry mapping of PAAO (AJ-2-04-20 sample)
<p>Spectroscopic ellipsometry measurement data obtained from the porous anodized aluminum oxide (PAAO). The sample was made by anodization of aluminum monocrystal in 0.3 mol/L oxalic acid at 40 V for 3 minutes and 37 seconds.</p> <p>The measurements were carried out at 20 × 20 locations covering all of the sample surface (approximately 4.8 × 4.8 mm<sup>2</sup>). The coordinates of each of 400 locations are available in "mapping_points.csv" file. All measurement data is also included in a single "AJ-2-04-20 Ellipsometry Mapping Measurements.rar" file.</p> <p>Ellipsometer: rotating compensator GES5-E (Semilab).</p> <p>Light source: 75 W xenon short arc lamp with 185-2000 nm wavelength spectrum.</p> <p>Detector: UV-Vis CCD with 0.8 nm resolution.</p> <p>Spectral range: approximately 230-960 nm.</p> <p>Light incidence angles: 50°, 55°, 60°, 65°, 70°, 75°.</p> <p>Light beam size: microspot (365 × 470 μm<sup>2</sup> at 75° angle of incidence).</p> <p>The same sample was also measured using the same spectroscopic ellipsometry method after being covered with gold nanoparticles. The data can be found here: https://doi.org/10.5281/zenodo.7059828</p>
Spectroscopic ellipsometry mapping of PAAO (AJ-4-04-20 sample)
<p>Spectroscopic ellipsometry measurement data obtained from the porous anodized aluminum oxide (PAAO). The sample was made by anodization of aluminum monocrystal in 0.3 mol/L oxalic acid at 40 V for 4 minutes and 30 seconds.</p> <p>The measurements were carried out at 20 × 20 locations covering all of the sample surface (approximately 4.8 × 4.8 mm<sup>2</sup>). The coordinates of each of 400 locations are available in "mapping_points.csv" file. All measurement data is also included in a single "AJ-4-04-20 Ellipsometry Mapping Measurements.rar" file.</p> <p>Ellipsometer: rotating compensator GES5-E (Semilab).</p> <p>Light source: 75 W xenon short arc lamp with 185-2000 nm wavelength spectrum.</p> <p>Detector: UV-Vis CCD with 0.8 nm resolution.</p> <p>Spectral range: approximately 230-960 nm.</p> <p>Light incidence angles: 50°, 55°, 60°, 65°, 70°, 75°.</p> <p>Light beam size: microspot (365 × 470 μm<sup>2</sup> at 75° angle of incidence).</p> <p>The same sample was also measured using the same spectroscopic ellipsometry method after being covered with gold nanoparticles. The data can be found here: https://doi.org/10.5281/zenodo.7115401</p>
Optical constants of several multilayer transition metal dichalcogenides measured by spectroscopic ellipsometry in the 300-1700 nm range: high-index, anisotropy, and hyperbolicity
<p># Data and plotting code for "Optical constants of several multilayer transition metal dichalcogenides measured by spectroscopic ellipsometry in the 300-1700 nm range: high-index, anisotropy, and hyperbolicity" by Battulga Munkhbat, Piotr Wróbel, Tomasz J. Antosiewicz, and Timur O. Shegai, ACS Photonics (2022); https://doi.org/10.1021/acsphotonics.2c00433</p> <p><br> ## Contents</p> <p>* <TMD-material>: directories with raw and derived data for all 10 TMDs<br> * f3_dataset_*_nm_ex1_ex2_ey1_ey2_ez1_ez2.txt: obtained permittivities<br> * plot_*_v1.m: Matlab scripts for plotting data</p> <p>## Description of the data</p> <p>The raw and derived data stored in directories <TMD> contain the following files:</p> <p>* <TMD>/<date>-<TMD>.SEsnap: binary data file with collected data, CompleteEASE format<br> * <TMD>/<date>-<TMD>-E*.mat: ascii text file with permittivity data separated into individual components as exported from CompleteEASE software<br> * <TMD>/<date>-<TMD>-full.mat: ascii text file with fitted model parameters as exported from CompleteEASE software<br> * <TMD>/<TMD>-data/*.txt: selected raw data and fits for all considered samples (Mueller Matrix or Delta/Psi/depolarization).</p> <p>The structure of the data file names is as follows:<br> <order-number-in-CompleteEASE>-s<sample-name>-<data-type>.txt for general ellipsometry (delta, psi, depolarization) or<br> <order-number-in-CompleteEASE>-s<sample-name>-o<in-plane-sample-rotation-number>-mm.txt for Mueller Matrix measurements.</p> <p>The following two scripts can be used to plot the raw measured data (solig lines) along with corresponding fits (black dotted lines):</p> <p>* plot_mm_v1.m: Matlab script for plotting Mueller Matrix data for WTe2 and ReS2<br> * plot_psi_delta_depol_v1.m: Matlab script for plotting psi, delta, and depolarization data for other TMDs</p> <p>The diagonal permittivity tensor data are saved in the f3_dataset_*_nm_ex1_ex2_ey1_ey2_ez1_ez2.txt files which can be plotted using the plot_permittivity_v1.m Matlab script. The format of this file is as follows:</p> <p>wavelength in nanometers; real part of epsilon_xx; imaginary part of epsilon_xx; real part of epsilon_yy; imaginary part of epsilon_yy; real part of epsilon_zz; imaginary part of epsilon_zz;</p> <p> </p> <p> </p>
Spectroscopic ellipsometry mapping of PAAO (AJ-6-03-31 sample)
<p>Spectroscopic ellipsometry measurement data obtained from the porous anodized aluminum oxide (PAAO). The sample was made by anodization of aluminum polycrystal in 0.3 mol/L oxalic acid at 40 V for 3 minutes and 42 seconds.</p> <p>The measurements were carried out at 20 × 20 locations covering all of the sample surface (approximately 4.8 × 4.8 mm<sup>2</sup>). The coordinates of each of 400 locations are available in "mapping_points.csv" file. All measurement data is also included in a single "AJ-6-03-31 Ellipsometry Mapping Measurements.rar" file.</p> <p>Ellipsometer: rotating compensator GES5-E (Semilab).</p> <p>Light source: 75 W xenon short arc lamp with 185-2000 nm wavelength spectrum.</p> <p>Detector: UV-Vis CCD with 0.8 nm resolution.</p> <p>Spectral range: approximately 230-960 nm.</p> <p>Light incidence angles: 50°, 55°, 60°, 65°, 70°, 75°.</p> <p>Light beam size: microspot (365 × 470 μm<sup>2</sup> at 75° angle of incidence).</p> <p>The same sample was also measured using the same spectroscopic ellipsometry method after being covered with hydrogenated amorphous diamond-like carbon and silver nanocomposite. The data can be found here: <a href="https://doi.org/10.5281/zenodo.7257252">https://doi.org/10.5281/zenodo.7257252</a></p>
Spectroscopic ellipsometry mapping of PAAO (AJ-7-03-31 sample)
<p>Spectroscopic ellipsometry measurement data obtained from the porous anodized aluminum oxide (PAAO). The sample was made by anodization of aluminum polycrystal in 0.3 mol/L oxalic acid at 40 V for 4 minutes and 35 seconds.</p> <p>The measurements were carried out at 20 × 20 locations covering all of the sample surface (approximately 4.8 × 4.8 mm<sup>2</sup>). The coordinates of each of 400 locations are available in "mapping_points.csv" file. All measurement data is also included in a single "AJ-7-03-31 Ellipsometry Mapping Measurements.rar" file.</p> <p>Ellipsometer: rotating compensator GES5-E (Semilab).</p> <p>Light source: 75 W xenon short arc lamp with 185-2000 nm wavelength spectrum.</p> <p>Detector: UV-Vis CCD with 0.8 nm resolution.</p> <p>Spectral range: approximately 230-960 nm.</p> <p>Light incidence angles: 50°, 55°, 60°, 65°, 70°, 75°.</p> <p>Light beam size: microspot (365 × 470 μm<sup>2</sup> at 75° angle of incidence).</p> <p>The same sample was also measured using the same spectroscopic ellipsometry method after being covered with hydrogenated amorphous diamond-like carbon and silver nanocomposite. The data can be found here: <a href="https://doi.org/10.5281/zenodo.7257907">https://doi.org/10.5281/zenodo.7257907</a></p>
Spectroscopic ellipsometry mapping of PAAO (AJ-8-03-31 sample)
<p>Spectroscopic ellipsometry measurement data obtained from the porous anodized aluminum oxide (PAAO). The sample was made by anodization of aluminum polycrystal in 0.3 mol/L oxalic acid at 40 V for 5 minutes and 4 seconds.</p> <p>The measurements were carried out at 20 × 20 locations covering all of the sample surface (approximately 4.8 × 4.8 mm<sup>2</sup>). The coordinates of each of 400 locations are available in "mapping_points.csv" file. All measurement data is also included in a single "AJ-8-03-31 Ellipsometry Mapping Measurements.rar" file.</p> <p>Ellipsometer: rotating compensator GES5-E (Semilab).</p> <p>Light source: 75 W xenon short arc lamp with 185-2000 nm wavelength spectrum.</p> <p>Detector: UV-Vis CCD with 0.8 nm resolution.</p> <p>Spectral range: approximately 230-960 nm.</p> <p>Light incidence angles: 50°, 55°, 60°, 65°, 70°, 75°.</p> <p>Light beam size: microspot (365 × 470 μm<sup>2</sup> at 75° angle of incidence).</p> <p>The same sample was also measured using the same spectroscopic ellipsometry method after being covered with hydrogenated amorphous diamond-like carbon and silver nanocomposite. The data can be found here: <a href="https://doi.org/10.5281/zenodo.7260186">https://doi.org/10.5281/zenodo.7260186</a></p>
Spectroscopic ellipsometry mapping of PAAO:Au (AJ-2-04-20-Au sample)
<p>Spectroscopic ellipsometry measurement data obtained from the porous anodized aluminum oxide covered with gold nanoparticles (PAAO:Au). The sample was made by anodization of aluminum monocrystal in 0.3 mol/L oxalic acid at 40 V for 3 minutes and 37 seconds. Then it was dip-coated in 60 nm diameter gold nanoparticles suspension. Extraction speed was 500 nm/s.</p> <p>The measurements were carried out at 20 × 20 locations covering all of the sample surface (approximately 4.8 × 4.8 mm<sup>2</sup>). The coordinates of each of 400 locations are available in "mapping_points.csv" file. All measurement data is also included in a single "AJ-2-04-20-Au Ellipsometry Mapping Measurements.rar" file.</p> <p>Ellipsometer: rotating compensator GES5-E (Semilab).</p> <p>Light source: 75 W xenon short arc lamp with 185-2000 nm wavelength spectrum.</p> <p>Detector: UV-Vis CCD with 0.8 nm resolution.</p> <p>Spectral range: approximately 230-960 nm.</p> <p>Light incidence angles: 50°, 55°, 60°, 65°, 70°, 75°.</p> <p>Light beam size: microspot (365 × 470 μm<sup>2</sup> at 75° angle of incidence).</p> <p>The same sample was also measured using the same spectroscopic ellipsometry method before being covered with gold nanoparticles. The data can be found here: https://doi.org/10.5281/zenodo.5718202</p>
Spectroscopic ellipsometry mapping of PAAO:Au (AJ-1-04-20-Au sample)
<p>Spectroscopic ellipsometry measurement data obtained from the porous anodized aluminum oxide covered with gold nanoparticles (PAAO:Au). The sample was made by anodization of aluminum monocrystal in 0.3 mol/L oxalic acid at 40 V for 3 minutes and 16 seconds. Then it was dip-coated in 60 nm diameter gold nanoparticles suspension. Extraction speed was 500 nm/s.</p> <p>The measurements were carried out at 20 × 20 locations covering all of the sample surface (approximately 4.8 × 4.8 mm<sup>2</sup>). The coordinates of each of 400 locations are available in "mapping_points.csv" file. All measurement data is also included in a single "AJ-1-04-20-Au Ellipsometry Mapping Measurements.rar" file.</p> <p>Ellipsometer: rotating compensator GES5-E (Semilab).</p> <p>Light source: 75 W xenon short arc lamp with 185-2000 nm wavelength spectrum.</p> <p>Detector: UV-Vis CCD with 0.8 nm resolution.</p> <p>Spectral range: approximately 230-960 nm.</p> <p>Light incidence angles: 50°, 55°, 60°, 65°, 70°, 75°.</p> <p>Light beam size: microspot (365 × 470 μm<sup>2</sup> at 75° angle of incidence).</p> <p>The same sample was also measured using the same spectroscopic ellipsometry method before being covered with gold nanoparticles. The data can be found here: https://doi.org/10.5281/zenodo.5718025</p>
Spectroscopic ellipsometry mapping of PAAO:Au (AJ-3-04-20-Au sample)
<p>Spectroscopic ellipsometry measurement data obtained from the porous anodized aluminum oxide covered with gold nanoparticles (PAAO:Au). The sample was made by anodization of aluminum monocrystal in 0.3 mol/L oxalic acid at 40 V for 4 minutes and 8 seconds. Then it was dip-coated in 60 nm diameter gold nanoparticles suspension. Extraction speed was 500 nm/s.</p> <p>The measurements were carried out at 20 × 20 locations covering all of the sample surface (approximately 4.8 × 4.8 mm<sup>2</sup>). The coordinates of each of 400 locations are available in "mapping_points.csv" file. All measurement data is also included in a single "AJ-3-04-20-Au Ellipsometry Mapping Measurements.rar" file.</p> <p>Ellipsometer: rotating compensator GES5-E (Semilab).</p> <p>Light source: 75 W xenon short arc lamp with 185-2000 nm wavelength spectrum.</p> <p>Detector: UV-Vis CCD with 0.8 nm resolution.</p> <p>Spectral range: approximately 230-960 nm.</p> <p>Light incidence angles: 50°, 55°, 60°, 65°, 70°, 75°.</p> <p>Light beam size: microspot (365 × 470 μm<sup>2</sup> at 75° angle of incidence).</p> <p>The same sample was also measured using the same spectroscopic ellipsometry method before being covered with gold nanoparticles. The data can be found here: https://doi.org/10.5281/zenodo.5718424</p>
Spectroscopic ellipsometry mapping of PAAO:Au (AJ-4-04-20-Au sample)
<p>Spectroscopic ellipsometry measurement data obtained from the porous anodized aluminum oxide covered with gold nanoparticles (PAAO:Au). The sample was made by anodization of aluminum monocrystal in 0.3 mol/L oxalic acid at 40 V for 4 minutes and 30 seconds. Then it was dip-coated in 60 nm diameter gold nanoparticles suspension. Extraction speed was 500 nm/s.</p> <p>The measurements were carried out at 20 × 20 locations covering all of the sample surface (approximately 4.8 × 4.8 mm<sup>2</sup>). The coordinates of each of 400 locations are available in "mapping_points.csv" file. All measurement data is also included in a single "AJ-4-04-20-Au Ellipsometry Mapping Measurements.rar" file.</p> <p>Ellipsometer: rotating compensator GES5-E (Semilab).</p> <p>Light source: 75 W xenon short arc lamp with 185-2000 nm wavelength spectrum.</p> <p>Detector: UV-Vis CCD with 0.8 nm resolution.</p> <p>Spectral range: approximately 230-960 nm.</p> <p>Light incidence angles: 50°, 55°, 60°, 65°, 70°, 75°.</p> <p>Light beam size: microspot (365 × 470 μm<sup>2</sup> at 75° angle of incidence).</p> <p>The same sample was also measured using the same spectroscopic ellipsometry method before being covered with gold nanoparticles. The data can be found here: https://doi.org/10.5281/zenodo.5734486</p>
Spectroscopic ellipsometry mapping of PAAO:Au (AJ-5-04-27-Au sample)
<p>Spectroscopic ellipsometry measurement data obtained from the porous anodized aluminum oxide covered with gold nanoparticles (PAAO:Au). The sample was made by anodization of aluminum monocrystal in 0.3 mol/L oxalic acid at 40 V for 4 minutes and 57 seconds. Then it was dip-coated in 60 nm diameter gold nanoparticles suspension. Extraction speed was 500 nm/s.</p> <p>The measurements were carried out at 20 × 20 locations covering all of the sample surface (approximately 4.8 × 4.8 mm<sup>2</sup>). The coordinates of each of 400 locations are available in "mapping_points.csv" file. All measurement data is also included in a single "AJ-5-04-27-Au Ellipsometry Mapping Measurements.rar" file.</p> <p>Ellipsometer: rotating compensator GES5-E (Semilab).</p> <p>Light source: 75 W xenon short arc lamp with 185-2000 nm wavelength spectrum.</p> <p>Detector: UV-Vis CCD with 0.8 nm resolution.</p> <p>Spectral range: approximately 230-960 nm.</p> <p>Light incidence angles: 50°, 55°, 60°, 65°, 70°, 75°.</p> <p>Light beam size: microspot (365 × 470 μm<sup>2</sup> at 75° angle of incidence).</p> <p>The same sample was also measured using the same spectroscopic ellipsometry method before being covered with gold nanoparticles. The data can be found here: https://doi.org/10.5281/zenodo.5734894</p>
Spectroscopic ellipsometry mapping of PAAO:DLC:Ag (AJ-8-03-31-DLCAg sample)
<p>Spectroscopic ellipsometry measurement data obtained from the porous anodized aluminum oxide (PAAO) covered with hydrogenated amorphous diamond-like carbon and silver (DLC:Ag) nanocomposite. The sample was made by 2 processes: (1) anodization of aluminum polycrystal in 0.3 mol/L oxalic acid at 40 V for 5 minutes and 4 seconds and then (2) depositing DLC:Ag employing reactive unbalanced magnetron sputtering in direct current mode using silver target (80 sccm argon gas flow, 5.4 sccm C<sub>2</sub>H<sub>2</sub> gas flow, 405 V voltage, 0.09-0.10 A current, 7·10<sup>-3</sup> mbar work pressure, 2 minutes 32 seconds process duration).</p> <p>The measurements were carried out at 20 × 20 locations covering all of the sample surface (approximately 4.8 × 4.8 mm<sup>2</sup>). The coordinates of each of 400 locations are available in "mapping_points.csv" file. All measurement data is also included in a single "AJ-8-03-31-DLCAg Ellipsometry Mapping Measurements.rar" file.</p> <p>Ellipsometer: rotating compensator GES5-E (Semilab).</p> <p>Light source: 75 W xenon short arc lamp with 185-2000 nm wavelength spectrum.</p> <p>Detector: UV-Vis CCD with 0.8 nm resolution.</p> <p>Spectral range: approximately 230-960 nm.</p> <p>Light incidence angles: 55°, 60°, 65°, 70°, 75°.</p> <p>Light beam size: microspot (365 × 470 μm<sup>2</sup> at 75° angle of incidence).</p> <p>The same sample was also measured using the same spectroscopic ellipsometry method before being covered with DLC:Ag. The data can be found here: <a href="https://doi.org/10.5281/zenodo.7056065">https://doi.org/10.5281/zenodo.7056065</a></p>
Spectroscopic ellipsometry mapping of PAAO:DLC:Ag (AJ-7-03-31-DLCAg sample)
<p>Spectroscopic ellipsometry measurement data obtained from the porous anodized aluminum oxide (PAAO) covered with hydrogenated amorphous diamond-like carbon and silver (DLC:Ag) nanocomposite. The sample was made by 2 processes: (1) anodization of aluminum polycrystal in 0.3 mol/L oxalic acid at 40 V for 4 minutes and 35 seconds and then (2) depositing DLC:Ag employing reactive unbalanced magnetron sputtering in direct current mode using silver target (80 sccm argon gas flow, 5.4 sccm C<sub>2</sub>H<sub>2</sub> gas flow, 405 V voltage, 0.09-0.10 A current, 7·10<sup>-3</sup> mbar work pressure, 2 minutes 32 seconds process duration).</p> <p>The measurements were carried out at 20 × 20 locations covering all of the sample surface (approximately 4.8 × 4.8 mm<sup>2</sup>). The coordinates of each of 400 locations are available in "mapping_points.csv" file. All measurement data is also included in a single "AJ-7-03-31-DLCAg Ellipsometry Mapping Measurements.rar" file.</p> <p>Ellipsometer: rotating compensator GES5-E (Semilab).</p> <p>Light source: 75 W xenon short arc lamp with 185-2000 nm wavelength spectrum.</p> <p>Detector: UV-Vis CCD with 0.8 nm resolution.</p> <p>Spectral range: approximately 230-960 nm.</p> <p>Light incidence angles: 55°, 60°, 65°, 70°, 75°.</p> <p>Light beam size: microspot (365 × 470 μm<sup>2</sup> at 75° angle of incidence).</p> <p>The same sample was also measured using the same spectroscopic ellipsometry method before being covered with DLC:Ag. The data can be found here: <a href="https://doi.org/10.5281/zenodo.7053393">https://doi.org/10.5281/zenodo.7053393</a></p>
Spectroscopic ellipsometry mapping of PAAO (AJ-5-04-27 sample)
<p>Spectroscopic ellipsometry measurement data obtained from the porous anodized aluminum oxide (PAAO). The sample was made by anodization of aluminum monocrystal in 0.3 mol/L oxalic acid at 40 V for 4 minutes and 57 seconds.</p> <p>The measurements were carried out at 20 × 20 locations covering all of the sample surface (approximately 4.8 × 4.8 mm<sup>2</sup>). The coordinates of each of 400 locations are available in "mapping_points.csv" file. All measurement data is also included in a single "AJ-5-04-27 Ellipsometry Mapping Measurements.rar" file.</p> <p>Ellipsometer: rotating compensator GES5-E (Semilab).</p> <p>Light source: 75 W xenon short arc lamp with 185-2000 nm wavelength spectrum.</p> <p>Detector: UV-Vis CCD with 0.8 nm resolution.</p> <p>Spectral range: approximately 230-960 nm.</p> <p>Light incidence angles: 50°, 55°, 60°, 65°, 70°, 75°.</p> <p>Light beam size: microspot (365 × 470 μm<sup>2</sup> at 75° angle of incidence).</p> <p>The same sample was also measured using the same spectroscopic ellipsometry method after being covered with gold nanoparticles. The data can be found here: https://doi.org/10.5281/zenodo.7118686</p>
Spectroscopic ellipsometry measurements of DLC:Ag (samples 139, 140)
<p>Spectroscopic ellipsometry measurement data obtained from the hydrogenated amorphous diamond-like carbon and silver (DLC:Ag) nanocomposite deposited on quartz (Q) and silicon (Si) substrates. DLC:Ag was deposited employing reactive unbalanced magnetron sputtering in direct current mode using silver target. Process parameters: 80 sccm argon gas flow, 5.4 sccm C<sub>2</sub>H<sub>2</sub> gas flow, 7·10<sup>-3</sup> mbar work pressure, 419-422 V or 405 V voltage (sample 139 or 140, respectively), 0.09-0.11 A or 0.09-0.10 A current (sample 139 or 140, respectively), 2 minutes 35 seconds or 2 minutes 32 seconds process duration (sample 139 or 140, respectively).</p> <p>The measurements were carried out at 5 locations on each sample and each substrate.</p> <p>Ellipsometer: rotating compensator GES5-E (Semilab).</p> <p>Light source: 75 W xenon short arc lamp with 185-2000 nm wavelength spectrum.</p> <p>Detector: UV-Vis CCD with 0.8 nm resolution.</p> <p>Spectral range: approximately 230-960 nm.</p> <p>Light incidence angles: 50°, 55°, 60°, 65°, 70°, 75°.</p> <p>Light beam size: microspot (365 × 470 μm<sup>2</sup> at 75° angle of incidence).</p>
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