Spectroscopic ellipsometry mapping of PAAO:DLC:Ag (AJ-8-03-31-DLCAg sample)

<p>Spectroscopic ellipsometry measurement data obtained from the porous anodized aluminum oxide (PAAO) covered with hydrogenated amorphous diamond-like carbon and silver (DLC:Ag) nanocomposite. The sample was made by 2 processes: (1) anodization of aluminum polycrystal in 0.3 mol/L oxalic acid at 40 V for 5 minutes and 4 seconds and then (2) depositing DLC:Ag employing reactive unbalanced magnetron sputtering in direct current mode using silver target (80 sccm argon gas flow, 5.4 sccm C₂H₂ gas flow, 405 V voltage, 0.09-0.10 A current, 7&middot;10^-3 mbar work pressure, 2 minutes 32 seconds process duration).</p> <p>The measurements were carried out at 20 &times; 20 locations covering all of the sample surface (approximately 4.8 &times; 4.8 mm²). The coordinates of each of 400 locations are available in &quot;mapping_points.csv&quot; file. All measurement data is also included in a single &quot;AJ-8-03-31-DLCAg Ellipsometry Mapping Measurements.rar&quot; file.</p> <p>Ellipsometer: rotating compensator GES5-E (Semilab).</p> <p>Light source: 75 W xenon short arc lamp with 185-2000 nm wavelength spectrum.</p> <p>Detector: UV-Vis CCD with 0.8 nm resolution.</p> <p>Spectral range: approximately 230-960 nm.</p> <p>Light incidence angles: 55&deg;, 60&deg;, 65&deg;, 70&deg;, 75&deg;.</p> <p>Light beam size: microspot (365 &times; 470 &mu;m² at 75&deg; angle of incidence).</p> <p>The same sample was also measured using the same spectroscopic ellipsometry method before being covered with DLC:Ag. The data can be found here: <a href="https://doi.org/10.5281/zenodo.7056065">https://doi.org/10.5281/zenodo.7056065</a></p>