Spectroscopic ellipsometry measurements of DLC:Ag (samples 139, 140)

<p>Spectroscopic ellipsometry measurement data obtained from the hydrogenated amorphous diamond-like carbon and silver (DLC:Ag) nanocomposite deposited on quartz (Q) and silicon (Si) substrates. DLC:Ag was deposited employing reactive unbalanced magnetron sputtering in direct current mode using silver target. Process parameters: 80 sccm argon gas flow, 5.4 sccm C₂H₂ gas flow, 7&middot;10^-3 mbar work pressure, 419-422 V or 405 V voltage (sample 139 or 140, respectively), 0.09-0.11 A or 0.09-0.10 A current (sample 139 or 140, respectively), 2 minutes 35 seconds or 2 minutes 32 seconds process duration (sample 139 or 140, respectively).</p> <p>The measurements were carried out at 5 locations on each sample and each substrate.</p> <p>Ellipsometer: rotating compensator GES5-E (Semilab).</p> <p>Light source: 75 W xenon short arc lamp with 185-2000 nm wavelength spectrum.</p> <p>Detector: UV-Vis CCD with 0.8 nm resolution.</p> <p>Spectral range: approximately 230-960 nm.</p> <p>Light incidence angles: 50&deg;, 55&deg;, 60&deg;, 65&deg;, 70&deg;, 75&deg;.</p> <p>Light beam size: microspot (365 &times; 470 &mu;m² at 75&deg; angle of incidence).</p>