Polished Silicon Wafer Substrate (1-4 inch) — 25-Pack
Pack of 25.
Single-side polished Czochralski silicon wafers, 1 to 4 inch, for SU-8 molds in microfluidic lithography and as substrates for coating, sputtering and surface analysis.

Louise Corscadden, PhD
Director of Science · ConductScience
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Key Specifications
Full details →- SKU family
- WHM-0167-25PK
- Shipping box
- 181.8 × 136.3 × 90.9 cm
- Ordering
- Online checkout and quote request available
- Category
- Lab Equipment
Polished Silicon Wafer Substrates are Czochralski-grown single-crystal silicon wafers polished on one side. They serve as mold substrates for microfluidic chip lithography, as substrates for LPCVD and PECVD coating and magnetron sputtering, as sample carriers for synchrotron work, and as substrates for XRD, SEM, AFM, infrared and fluorescence spectroscopy.
Specifications
- Diameter: 1 to 4 inch
- Thickness: 0.2, 0.4, 1.0 or 1.2 mm
- Growth: Czochralski (Cz) single crystal
- Polish: one side, roughness Ra under 0.5 nm
- Doping: phosphorus or boron
- Orientation: (100) or (111)
- Resistivity: under 0.0015, 0.001–0.5 or 1–10 Ω·cm
- Flatness (TIR) under 3 µm; TTV under 10 µm; bow under 10 µm
Pack of 25 wafers. Give the diameter, thickness, doping, orientation and resistivity you need when you order.
Shipping weight
- 3.3 lb
Shipping box
- L: 181.8 cm
- W: 136.3 cm
- H: 90.9 cm
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