Semiconductor, packaging & electronics

Wafer edge, bow & warp inspection

Locate edge chips and measure image-derived edge geometry before handling, lithography, or packaging.

Modalities:Edge inspectionOptical profilometryMacro imaging
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Illustrative side view of a silicon wafer edge with a small chip for edge and geometry inspection
3
Edge chips
58 µm
Largest chip
14 µm
Bow

Example outputs shown for illustration. Numbers depend on your samples and protocol.

Image: Illustrative rendering (AI-generated, gpt-image-2), not a photograph of a specific wafer

What you get

Edge-chip map
Chip length & depth proxy
Edge exclusion zone
Bow / warp profile
Annotated wafer record

The measurement, today

Edge damage and wafer geometry are often logged as separate pass/fail checks. The image evidence is not consistently retained, and a small edge chip can be missed until a handling or coating issue appears.

What it costs

Edge defects can seed breakage, handling failures, and exclusion-zone losses. Geometry trends are more useful when tied back to the actual wafer image and lot.

From image to reviewed result

  1. 1

    Image the edge

    Capture the edge and exclusion zone with your edge-inspection or optical-profilometry system.

  2. 2

    Register the wafer

    Align the edge image set to wafer coordinates so each finding keeps its angular location.

  3. 3

    Measure findings

    Segment chips and visible edge damage, then calculate the configured bow or warp profile from the supplied geometry images.

  4. 4

    Export the record

    Deliver an image-linked defect list and geometry summary for review.

Scope: Reports geometry from calibrated image or profilometry inputs. Use your qualified tool and site method for any handling, process, or acceptance limit.

Send a sample image and a measurement goal

We will show the closest ConductVision workflow and flag what needs custom validation for your images.